{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Metrology, Inspection & Process Control for Microlithography XI: 10-12 March 1997 Santa Clara, California (Proceedings of Spie)","author_name":"","thumbnail_url":"https://www.ebooknetworking.net/books/081/942/big0819424641.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0819424641.html\">Metrology, Inspection &amp; Process Control for Microlithography XI: 10-12 March 1997 Santa Clara, California (Proceedings of Spie)</a>","width":400,"height":300}