{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Emerging Lithographic Technologies II: 23-25 February 1998 Santa Clara, California (Proceedings of Spie, Volume 3331)","author_name":"Society of Photo-Optical Instrumentation Engineers","thumbnail_url":"https://www.ebooknetworking.net/books/081/942/big0819427764.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0819427764.html\">Emerging Lithographic Technologies II: 23-25 February 1998 Santa Clara, California (Proceedings of Spie, Volume 3331)</a>","width":400,"height":300}