{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Materials and Device Characterization in Micromachining II: 20-21 September 1999 Santa Clara, California (Proceedings of Spie, Volume 3875)","author_name":"Solid State Technology (Organization)","thumbnail_url":"https://www.ebooknetworking.net/books/081/943/big0819434728.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0819434728.html\">Materials and Device Characterization in Micromachining II: 20-21 September 1999 Santa Clara, California (Proceedings of Spie, Volume 3875)</a>","width":400,"height":300}