{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Micro Opto Electro Mechanical Systems Papers Presented at Applied Photo Optical Instrumentation Symposium (SPIE Conference Proceedings)","author_name":"R. R. Syns","thumbnail_url":"https://www.ebooknetworking.net/books/081/943/big0819437123.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0819437123.html\">Micro Opto Electro Mechanical Systems Papers Presented at Applied Photo Optical Instrumentation Symposium (SPIE Conference Proceedings)</a>","width":400,"height":300}