{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Mems/Moems: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly (Proceedings of SPIE)","author_name":"Uwe F. W. Behringer, Bernard Courtois, Ali M. Khounsary, Deepak Uttamchandani","thumbnail_url":"https://www.ebooknetworking.net/books/081/944/big0819447404.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0819447404.html\">Mems/Moems: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly (Proceedings of SPIE)</a>","width":400,"height":300}