{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Micromachining Technology for Micro-Optics and Nano-Optics: 28-29 January 2003, San Jose, California, USA (Spie Proceeding)","author_name":"","thumbnail_url":"https://www.ebooknetworking.net/books/noimage.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0819447846.html\">Micromachining Technology for Micro-Optics and Nano-Optics: 28-29 January 2003, San Jose, California, USA (Spie Proceeding)</a>","width":400,"height":300}