{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Selected Papers on Resolution Enhancement Techniques in Optical Lithography (SPIE Milestone Series Vol. MS178)","author_name":"F. M. Schellenberg","thumbnail_url":"https://www.ebooknetworking.net/books/noimage.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0819451665.html\">Selected Papers on Resolution Enhancement Techniques in Optical Lithography (SPIE Milestone Series Vol. MS178)</a>","width":400,"height":300}