{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Reliability, Testing, and Characterization of Mems/Moems III: Proceedings of Spie, 26-28 January 2004, San Jose, California, Usa","author_name":"","thumbnail_url":"https://www.ebooknetworking.net/books/081/945/big0819452513.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0819452513.html\">Reliability, Testing, and Characterization of Mems/Moems III: Proceedings of Spie, 26-28 January 2004, San Jose, California, Usa</a>","width":400,"height":300}