{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Principles of Lithography, Second Edition (SPIE Press Monograph Vol. PM146)","author_name":"Harry J. Levinson","thumbnail_url":"https://www.ebooknetworking.net/books/081/945/big0819456608.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0819456608.html\">Principles of Lithography, Second Edition (SPIE Press Monograph Vol. PM146)</a>","width":400,"height":300}