{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"21st European Mask And Lithography Conference (Proceedings of SPIE)","author_name":"Uwe F. Behringer","thumbnail_url":"https://www.ebooknetworking.net/books/081/945/big0819458309.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0819458309.html\">21st European Mask And Lithography Conference (Proceedings of SPIE)</a>","width":400,"height":300}