{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Mems/Moems Components and Their Applications 3: 23-25 January 2006, San Jose, Ca, USA (Proceedings of SPIE)","author_name":"","thumbnail_url":"https://www.ebooknetworking.net/books/noimage.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0819461555.html\">Mems/Moems Components and Their Applications 3: 23-25 January 2006, San Jose, Ca, USA (Proceedings of SPIE)</a>","width":400,"height":300}