{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Device and Process Technologies for Microelectronics, Mems, Photonics, and Nanotechnology IV (Proceedings of Spie)","author_name":"Hark Hoe Tan, Jung-Chih Chiao, Lorenzo Faraone, Chennupati Jagadish, Jim Williams","thumbnail_url":"https://www.ebooknetworking.net/books/noimage.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0819469718.html\">Device and Process Technologies for Microelectronics, Mems, Photonics, and Nanotechnology IV (Proceedings of Spie)</a>","width":400,"height":300}