{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Extreme Ultraviolet (EUV) Lithography","author_name":"Bruno La Fontaine","thumbnail_url":"https://www.ebooknetworking.net/books/081/948/big0819480509.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0819480509.html\">Extreme Ultraviolet (EUV) Lithography</a>","width":400,"height":300}