{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Photonics West - MOEMS-MEMS 2011: Micro - and Nanofabrication","author_name":"SPIE","thumbnail_url":"https://www.ebooknetworking.net/books/081/948/big0819485012.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0819485012.html\">Photonics West - MOEMS-MEMS 2011: Micro - and Nanofabrication</a>","width":400,"height":300}