{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Extreme Ultraviolet Lithography (SPIE Special Collections)","author_name":"Vivek Bakshi, Anthony Yen","thumbnail_url":"https://www.ebooknetworking.net/books/081/949/big0819494887.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0819494887.html\">Extreme Ultraviolet Lithography (SPIE Special Collections)</a>","width":400,"height":300}