{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Tribology In Chemical-Mechanical Planarization","author_name":"Hong Liang, David Craven","thumbnail_url":"https://www.ebooknetworking.net/books/082/472/big0824725670.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0824725670.html\">Tribology In Chemical-Mechanical Planarization</a>","width":400,"height":300}