{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Nano- and Micro-Electromechanical Systems: Fundamentals of Nano- and Microengineering","author_name":"Sergey Edward Lyshevski","thumbnail_url":"https://www.ebooknetworking.net/books/084/930/big0849309166.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0849309166.html\">Nano- and Micro-Electromechanical Systems: Fundamentals of Nano- and Microengineering</a>","width":400,"height":300}