{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Nanolithography: The Art of Fabricating Nanoelectronic and Nanophotonic Devices and Systems (Woodhead Publishing Series in Electronic and Optical Materials)","author_name":"","thumbnail_url":"https://www.ebooknetworking.net/books/085/709/big0857095005.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0857095005.html\">Nanolithography: The Art of Fabricating Nanoelectronic and Nanophotonic Devices and Systems (Woodhead Publishing Series in Electronic and Optical Materials)</a>","width":400,"height":300}