{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Plasma etching and reactive ion etching (American Vacuum Society monograph series)","author_name":"J. W Coburn","thumbnail_url":"https://www.ebooknetworking.net/books/088/318/big0883184060.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0883184060.html\">Plasma etching and reactive ion etching (American Vacuum Society monograph series)</a>","width":400,"height":300}