{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Micromachining of Elements With Optical and Other Submicrometer Dimensional and Surface Specifications: 2-3 April, 1987, the Hague, the Netherlands ... Society for Optical Engineering, V. 803.)","author_name":"","thumbnail_url":"https://www.ebooknetworking.net/books/noimage.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0892528389.html\">Micromachining of Elements With Optical and Other Submicrometer Dimensional and Surface Specifications: 2-3 April, 1987, the Hague, the Netherlands ... Society for Optical Engineering, V. 803.)</a>","width":400,"height":300}