{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Laser and Particle-Beam Chemical Processing for Microelectronics: Volume 101 (MRS Proceedings)","author_name":"","thumbnail_url":"https://www.ebooknetworking.net/books/093/183/big0931837693.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0931837693.html\">Laser and Particle-Beam Chemical Processing for Microelectronics: Volume 101 (MRS Proceedings)</a>","width":400,"height":300}