{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications","author_name":"Tommi Kääriäinen, David Cameron, Marja-Leena Kääriäinen, Arthur Sherman","thumbnail_url":"https://www.ebooknetworking.net/books/111/806/big1118062779.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-1118062779.html\">Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications</a>","width":400,"height":300}