{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Design of atmospheric pressure plasma CVD process for deposition of silicon nitride thin films using dielectric barrier discharge.","author_name":"Shunfu Hu","thumbnail_url":"https://www.ebooknetworking.net/books/124/342/big1243426802.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-1243426802.html\">Design of atmospheric pressure plasma CVD process for deposition of silicon nitride thin films using dielectric barrier discharge.</a>","width":400,"height":300}