{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Copper surface chemistry relevant to chemical mechanical planarization (CMP).","author_name":"Karen Lynn Stewart","thumbnail_url":"https://www.ebooknetworking.net/books/124/356/big1243567821.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-1243567821.html\">Copper surface chemistry relevant to chemical mechanical planarization (CMP).</a>","width":400,"height":300}