{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"A study of reticle non-flatness induced image placement error in extreme ultraviolet lithography.","author_name":"Sudharshanan Raghunathan","thumbnail_url":"https://www.ebooknetworking.net/books/124/372/big1243722282.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-1243722282.html\">A study of reticle non-flatness induced image placement error in extreme ultraviolet lithography.</a>","width":400,"height":300}