{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Extreme ultraviolet lithography: A few more pieces of the puzzle.","author_name":"Christopher Neil Anderson","thumbnail_url":"https://www.ebooknetworking.net/books/124/410/big124410440X.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-124410440X.html\">Extreme ultraviolet lithography: A few more pieces of the puzzle.</a>","width":400,"height":300}