{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Handbook of Sputter Deposition Technology, Second Edition: Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS","author_name":"Kiyotaka Wasa","thumbnail_url":"https://www.ebooknetworking.net/books/143/773/big1437734839.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-1437734839.html\">Handbook of Sputter Deposition Technology, Second Edition: Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS</a>","width":400,"height":300}