{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Materials & Process Integration for MEMS (Microsystems)","author_name":"","thumbnail_url":"https://www.ebooknetworking.net/books/noimage.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-1441953035.html\">Materials &amp; Process Integration for MEMS (Microsystems)</a>","width":400,"height":300}