{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Osa Proceedings on Extreme Ultraviolet Lithography: Proceedings of the Tropical Meeting, September 19-21, 1994 Monterey, California","author_name":"Frits Zernike","thumbnail_url":"https://www.ebooknetworking.net/books/155/752/big1557523630.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-1557523630.html\">Osa Proceedings on Extreme Ultraviolet Lithography: Proceedings of the Tropical Meeting, September 19-21, 1994 Monterey, California</a>","width":400,"height":300}