{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Extreme ultraviolet lithography: From the topical meeting, May 1-3, 1996, Boston, Massachusetts (OSA trends in optics and photonics)","author_name":"Don R. Kania (eds.) Glenn D. Kubiak","thumbnail_url":"https://www.ebooknetworking.net/books/155/752/big1557524351.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-1557524351.html\">Extreme ultraviolet lithography: From the topical meeting, May 1-3, 1996, Boston, Massachusetts (OSA trends in optics and photonics)</a>","width":400,"height":300}