{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Surface Chemical Cleaning and Passivation for Semiconductor Processing: Symposium Held April 13-15, 1993, San Francisco, California, U.S.A. (Materials Research Society Symposium Proceedings)","author_name":"Greg S. Higashi, Eugene A. Irene","thumbnail_url":"https://www.ebooknetworking.net/books/155/899/big1558992138.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-1558992138.html\">Surface Chemical Cleaning and Passivation for Semiconductor Processing: Symposium Held April 13-15, 1993, San Francisco, California, U.S.A. (Materials Research Society Symposium Proceedings)</a>","width":400,"height":300}