{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Plasma Etching Processes for Interconnect Realization in VLSI","author_name":"","thumbnail_url":"https://www.ebooknetworking.net/books/178/548/big1785480154.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-1785480154.html\">Plasma Etching Processes for Interconnect Realization in VLSI</a>","width":400,"height":300}