{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Plasma Techniques for Film Deposition","author_name":"Mitsuharu Konuma","thumbnail_url":"https://www.ebooknetworking.net/books/184/265/big184265151X.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-184265151X.html\">Plasma Techniques for Film Deposition</a>","width":400,"height":300}