{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Nano Electro Mechanical Systems: Downscaling Resonant Sensors (Iste)","author_name":"Sébastien Hentz","thumbnail_url":"https://www.ebooknetworking.net/books/184/821/big1848216319.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-1848216319.html\">Nano Electro Mechanical Systems: Downscaling Resonant Sensors (Iste)</a>","width":400,"height":300}