{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Micromechanical Photonics (Microtechnology and MEMS)","author_name":"Hiroo Ukita","thumbnail_url":"https://www.ebooknetworking.net/books/354/031/big3540313338.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-3540313338.html\">Micromechanical Photonics (Microtechnology and MEMS)</a>","width":400,"height":300}