{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"SiO2 in Si Microdevices","author_name":"Manabu Itsumi","thumbnail_url":"https://www.ebooknetworking.net/books/354/043/big3540433392.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-3540433392.html\">SiO2 in Si Microdevices</a>","width":400,"height":300}