{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Mechanical Microsensors (Microtechnology and MEMS)","author_name":"Miko Elwenspoek, R. Wiegerink","thumbnail_url":"https://www.ebooknetworking.net/books/354/067/big3540675825.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-3540675825.html\">Mechanical Microsensors (Microtechnology and MEMS)</a>","width":400,"height":300}