{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Process Modeling of Chemical Mechanical Planarization: An Integrated Model from Abrasive Scale to Chip Scale; Basics, Characterizations, Modeling and Verification","author_name":"Choi, Jihong","thumbnail_url":"https://www.ebooknetworking.net/books/363/900/big3639001664.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-3639001664.html\">Process Modeling of Chemical Mechanical Planarization: An Integrated Model from Abrasive Scale to Chip Scale; Basics, Characterizations, Modeling and Verification</a>","width":400,"height":300}