{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Sensor Based Modeling of Copper Chemical Mechanical Planarization: Modeling the slurry chemistry effects on Material Removal Rate (MRR)","author_name":"Upendra Phatak","thumbnail_url":"https://www.ebooknetworking.net/books/363/913/big3639133714.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-3639133714.html\">Sensor Based Modeling of Copper Chemical Mechanical Planarization: Modeling the slurry chemistry effects on Material Removal Rate (MRR)</a>","width":400,"height":300}