{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Principles of Dielectric Chemical Mechanical Planarization: TRIBOLOGICAL, THERMAL AND KINETIC CHARACTERIZATION OF DIELECTRIC AND Tungsten CHEMICAL MECHANICAL PLANARIZATION PROCESSES","author_name":"Jamshid Sorooshian","thumbnail_url":"https://www.ebooknetworking.net/books/363/917/big3639176812.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-3639176812.html\">Principles of Dielectric Chemical Mechanical Planarization: TRIBOLOGICAL, THERMAL AND KINETIC CHARACTERIZATION OF DIELECTRIC AND Tungsten CHEMICAL MECHANICAL PLANARIZATION PROCESSES</a>","width":400,"height":300}