{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Tribological Phenomena in Chemical Mechanical  Polishing: Fluid Pressure, Friction and Wear","author_name":"Sum Huan Ng","thumbnail_url":"https://www.ebooknetworking.net/books/363/918/big3639182154.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-3639182154.html\">Tribological Phenomena in Chemical Mechanical  Polishing: Fluid Pressure, Friction and Wear</a>","width":400,"height":300}