{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Film Deposition by Plasma Techniques (Springer Series on Atomic, Optical, and Plasma Physics)","author_name":"Mitsuharu Konuma","thumbnail_url":"https://www.ebooknetworking.net/books/364/284/big3642845134.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-3642845134.html\">Film Deposition by Plasma Techniques (Springer Series on Atomic, Optical, and Plasma Physics)</a>","width":400,"height":300}