{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Design of a Capacitive based Closed-Loop Displacement Sensor: Conceptual design of a MEMS displacement sensor smaller than 1x1 mm with a resolution of 1 nanometer","author_name":"Schabbink, Johan","thumbnail_url":"https://www.ebooknetworking.net/books/365/910/big3659107948.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-3659107948.html\">Design of a Capacitive based Closed-Loop Displacement Sensor: Conceptual design of a MEMS displacement sensor smaller than 1x1 mm with a resolution of 1 nanometer</a>","width":400,"height":300}