{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"An Introduction to MEMS Technology: Design & Analysis of MEMS Based Microheater Array on SOI Wafer for Low Power Gas Sensor Applications","author_name":"Avigyan Datta Gupta, Chirashree Roy Chowdhury","thumbnail_url":"https://www.ebooknetworking.net/books/365/924/big3659247006.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-3659247006.html\">An Introduction to MEMS Technology: Design &amp; Analysis of MEMS Based Microheater Array on SOI Wafer for Low Power Gas Sensor Applications</a>","width":400,"height":300}