{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Structure Evolution, Properties, and Application of Alumina Films Deposited by PECVD","author_name":"Denis Kurapov","thumbnail_url":"https://www.ebooknetworking.net/books/383/224/big3832241760.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-3832241760.html\">Structure Evolution, Properties, and Application of Alumina Films Deposited by PECVD</a>","width":400,"height":300}