{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Aluminum Nitride Thin Films: Deposition for Fabrication, Characterization and Fabrication of Surface Acoustic Wave Devices","author_name":"Charlee Fansler","thumbnail_url":"https://www.ebooknetworking.net/books/383/646/big3836469723.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-3836469723.html\">Aluminum Nitride Thin Films: Deposition for Fabrication, Characterization and Fabrication of Surface Acoustic Wave Devices</a>","width":400,"height":300}