{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Fabrication of SiGe nanostructures for infrared devices: Herstellung von SiGe Nanostrukturen für infrarot-optische Bauteile","author_name":"Pachinger, Dietmar","thumbnail_url":"https://www.ebooknetworking.net/books/383/810/big3838108345.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-3838108345.html\">Fabrication of SiGe nanostructures for infrared devices: Herstellung von SiGe Nanostrukturen für infrarot-optische Bauteile</a>","width":400,"height":300}