{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Engineered Particulate Systems for Chemical Mechanical Planarization: A Systematic Approach to Slurry Formulation for Oxide CMP","author_name":"G. Bahar Basim","thumbnail_url":"https://www.ebooknetworking.net/books/384/336/big3843363463.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-3843363463.html\">Engineered Particulate Systems for Chemical Mechanical Planarization: A Systematic Approach to Slurry Formulation for Oxide CMP</a>","width":400,"height":300}