{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"High-Rate Reactive Magnetron Sputter Deposition and Characterization of Metal Oxide Films (Comprehensive Summaries of Uppsala Dissertations, 520)","author_name":"Maryam Kharrazi Olsson","thumbnail_url":"https://www.ebooknetworking.net/books/915/544/big9155446833.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-9155446833.html\">High-Rate Reactive Magnetron Sputter Deposition and Characterization of Metal Oxide Films (Comprehensive Summaries of Uppsala Dissertations, 520)</a>","width":400,"height":300}