{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Journal of Vacuum Science & Technology B: Second Series, Vol 1, Number 4, October-December 1983","author_name":"American Vacuum Society","thumbnail_url":"https://www.ebooknetworking.net/books/noimage.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-B000KUFCOO.html\">Journal of Vacuum Science &amp; Technology B: Second Series, Vol 1, Number 4, October-December 1983</a>","width":400,"height":300}